Most superconducting r.f. cavities are made of Nb. Their performance i
s closely related to the purity of Nb's surface. Adequate characteriza
tion tools are needed to qualify the cavity surface. An improvement of
the classical ERD method of hydrogen analysis has been achieved using
an electromagnetic (EXB) filter. Thus, the depth resolution in Nb was
17 nm. This method was used to select the best procedure for bulk and
thin coated Nb cavity fabrication.