STUDY OF HYDROGEN IN DLC FILM BY ERDA WITH NI-58 IONS

Authors
AVASTHI DK KABIRAJ D",JAIPAL,"MEHTA GK BARSHILIA HC SAH S MEHTA BR VANKAR VD
Citation
Dk. Avasthi et al., STUDY OF HYDROGEN IN DLC FILM BY ERDA WITH NI-58 IONS, Vacuum, 46(7), 1995, pp. 633-636
Citations number
20
Categorie Soggetti
Physics, Applied
Journal title
Vacuum → ACNP
ISSN journal
0042207X
Volume
46
Issue
7
Year of publication
1995
Pages
633 - 636
Database
ISI
SICI code
0042-207X(1995)46:7<633:SOHIDF>2.0.ZU;2-4
Abstract
The content of hydrogen and its depth profile in diamond like carbon ( DLC) films deposited by the microwave plasma deposition technique is d etermined by Elastic Recoil Detection Analysis (ERDA) using 85 MeV Ni- 58 ions. Simultaneous defection of hydrogen and carbon recoils provide d a method to determine the relative number of hydrogen:carbon atoms w ithout using a standard H sample for quantitative calibration.