METAL INP THIN-FILM REACTIONS - STUDIES USING MASS AND ENERGY-DISPERSIVE RECOIL SPECTROMETRY/

Preliminary results are presented from a study of transition metal/InP reactions using mass and energy dispersive recoil spectrometry. 50 nm films of Ni, Pd and Pt were evaporated on InP substrates, heat treate d in vacuum and subsequently analysed with X-ray diffraction and mass and energy dispersive recoil spectrometry using 77 MeV(127)I(10+) ions as projectiles. The unique information on the elemental distributions in the Surface layers which can be obtained using the latter techniqu e has allowed us to follow the progress of the solid state reactions. These reactions are quite different for the three metals studied, with significant P loss in the Pd/InP case.