Y. Matsuoka et al., DESIGN METHOD FOR SENSING BODY OF DIFFERENTIAL PRESSURE TRANSMITTER USING SILICON DIAPHRAGM-TYPE PRESSURE SENSOR, IEEE transactions on instrumentation and measurement, 44(3), 1995, pp. 791-794
This paper describes a design method for the three-diaphragm-type sens
ing body of a differential pressure transmitter, This sensing body pro
tects the silicon diaphragm-type pressure sensor from over-pressure, T
he design method includes information bn how to decide the stiffness o
f each metal diaphragm and the liquid quantity needed to fill the sens
ing body, The differential pressure transmitter, with significant stab
ilities, has zero-influence errors of static pressure and over-pressur
e of less than -0.2% and +/-0.1%, respectively, and is obtained at a m
easuring span of 25 kPa and a line pressure of 15 MPa.