DESIGN METHOD FOR SENSING BODY OF DIFFERENTIAL PRESSURE TRANSMITTER USING SILICON DIAPHRAGM-TYPE PRESSURE SENSOR

This paper describes a design method for the three-diaphragm-type sens ing body of a differential pressure transmitter, This sensing body pro tects the silicon diaphragm-type pressure sensor from over-pressure, T he design method includes information bn how to decide the stiffness o f each metal diaphragm and the liquid quantity needed to fill the sens ing body, The differential pressure transmitter, with significant stab ilities, has zero-influence errors of static pressure and over-pressur e of less than -0.2% and +/-0.1%, respectively, and is obtained at a m easuring span of 25 kPa and a line pressure of 15 MPa.