FATIGUE OF MICROLITHOGRAPHICALLY-PATTERNED FREESTANDING ALUMINUM THIN-FILM UNDER AXIAL STRESSES

Authors
Citation
Dt. Read et Jw. Dally, FATIGUE OF MICROLITHOGRAPHICALLY-PATTERNED FREESTANDING ALUMINUM THIN-FILM UNDER AXIAL STRESSES, Journal of electronic packaging, 117(1), 1995, pp. 1-6
Citations number
13
Categorie Soggetti
Engineering, Mechanical","Engineering, Eletrical & Electronic
ISSN journal
10437398
Volume
117
Issue
1
Year of publication
1995
Pages
1 - 6
Database
ISI
SICI code
1043-7398(1995)117:1<1:FOMFAT>2.0.ZU;2-P
Abstract
Fatigue life as a function of number of stress cycles has been determi ned for three-layer titanium-aluminum-titanium thin-film specimens. Fo r nominal stresses ranging from 50 to 90 percent of the upper-bound ul timate strength, the fatigue lives ranged up to 76 cycles. In all spec imens, active crack were observed after only a few stress cycles. Thes e crack grew with repeated cycling. The fatigue life was reached when the specimen could no longer sustain the maximum cyclic stress.