The interaction of chlorine with the hydrogenated diamond surface has
been investigated by diffuse reflectance Fourier-transform Infrared (F
TIR) spectroscopy, temperature-programmed desorption (TPD) spectroscop
y, and X-ray photoelectron spectroscopy (XPS). The hydrogenated diamon
d surface is chlorinated by thermal reaction in chlorine. Hydrogen che
misorbed on the diamond surface is abstracted by chlorine and the chem
isorption of chlorine is yielded. Hydroxyl groups are produced by trea
tment of the chlorinated diamond with water vapor at room temperature.
Amino groups are produced by treatment of the chlorinated diamond wit
h ammonia at 425 degrees C.