RANGE PARAMETER STUDY OF AU AND BI IMPLANTED INTO CARBON NITRIDE FILMS

Authors
KASCHNY JR PEREZ R BEHAR M HOFSAESS H FINK D
Citation
Jr. Kaschny et al., RANGE PARAMETER STUDY OF AU AND BI IMPLANTED INTO CARBON NITRIDE FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 122(1), 1997, pp. 8-12
Citations number
23
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
122
Issue
1
Year of publication
1997
Pages
8 - 12
Database
ISI
SICI code
0168-583X(1997)122:1<8:RPSOAA>2.0.ZU;2-A
Abstract
Range profiles of 15 to 200 keV Au and Bi in carbon-nitride films have been measured for the first time. It turns out that the measured rang es deviate by as much as 30% for Bi and 25% for Au from theoretical pr edictions. The measured range stragglings are even larger by a factor of two than theoretically expected. These differences can be explained by contributions of cross terms between electronic and nuclear energy transfer which are not yet taken into account in the presently availa ble computer codes.