The effect of Cl doping on the luminescence properties of CdTe is inve
stigated by cathodoluminescence microscopy. Cl enhances the 1.4 eV emi
ssion and retards the appearance of the tellurium vacancy related emis
sion band. The behaviour under annealing indicates that doping with su
bstitutional impurities involved in A-centers influences the intensity
of the 1.4 eV band.