FABRICATION OF STM TIP BY ELECTROCHEMICAL ETCHING METHOD

Authors
NISHIYAMA T NAKAMURA KI KOBAYAKAWA K SATO Y TAMURA S KOURA N
Citation
T. Nishiyama et al., FABRICATION OF STM TIP BY ELECTROCHEMICAL ETCHING METHOD, Denki Kagaku Oyobi Kogyo Butsuri Kagaku, 63(3), 1995, pp. 230-233
Citations number
8
Categorie Soggetti
Electrochemistry
Journal title
Denki Kagaku Oyobi Kogyo Butsuri Kagaku → ACNP
ISSN journal
03669297
Volume
63
Issue
3
Year of publication
1995
Pages
230 - 233
Database
ISI
SICI code
0366-9297(1995)63:3<230:FOSTBE>2.0.ZU;2-Y
Abstract
It is known that ''drop off'' phenomenon is important to fabricate a S TM tip by electrochemical etching method. In this paper, we have tried to make sharp tip by new and easy method. Tip sharpness depends on '' drop off'' length STM tip radius obtained by this method is smaller th an 20nm.