A NEW FAMILY OF HEAVY TRANSITION-METAL COORDINATION-COMPOUNDS AND ITSAPPLICATION .1. DESIGN, SYNTHESIS AND CHARACTERIZATION OF VOLATILE ORGANOHAFNIUM PRECURSORS

The first three representatives of a new family of volatile organohafn ium compounds suitable as metallo-organic chemical vapour deposition p recursors were synthesized. A combination of cyclopentadienyl- and alk oxo-ligands with a bicyclo[2.2.1]heptane framework was used. Volatilit y at relatively low temperatures for hafnium compounds was found and t he precursors were characterized by elemental analysis and spectroscop ic methods (IR, H-1 and C-13 NMR, mass spectrometry and mass-analysed ion kinetic energy spectroscopy). The outlook for use in hafnium funct ional materials synthesis was derived from the fragmentation data.