PREPARATION OF YBA2CU3OY SUPERCONDUCTING THIN-FILMS BY RADIOFREQUENCYPLASMA FLASH EVAPORATION APPARATUS

Authors
KOMORI K FUKAGAWA W FUKUTOMI M TANAKA Y ASANO T MAEDA H HOSOKAWA N
Citation
K. Komori et al., PREPARATION OF YBA2CU3OY SUPERCONDUCTING THIN-FILMS BY RADIOFREQUENCYPLASMA FLASH EVAPORATION APPARATUS, Phase transitions, 42(1-2), 1993, pp. 117-122
Citations number
9
Categorie Soggetti
Crystallography,"Physics, Condensed Matter
Journal title
Phase transitions → ACNP
ISSN journal
01411594
Volume
42
Issue
1-2
Year of publication
1993
Part
B
Pages
117 - 122
Database
ISI
SICI code
0141-1594(1993)42:1-2<117:POYSTB>2.0.ZU;2-1
Abstract
We have attempted to deposit YBa2Cu3Oy oxide superconducting thin film s using low-pressure plasma flash evaporation. The RF plasmas used wer e sustained at 20-30 Torr by a 13.56 MHz RF generator operated at 8-10 kW. We have obtained dense and shiny films at a deposition rate of ab out 10 Angstrom/s. The best film on MgO(100) substrate showed a sharp resistive transition with T-c(resistivity; p = 0) as high as 91 K and J(c) of 4.3 x 10(4) A/cm(2) at 77 K and zero field.