S. Beole et al., STEPS TOWARDS THE USE OF SILICON DRIFT DETECTORS IN HEAVY-ION COLLISIONS AT LHC, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 360(1-2), 1995, pp. 67-70
The inner tracking system of the ALICE detector for Pb-Pb collisions a
t the LHC require a very good granularity in the innermost planes, due
to the high particle density, up to 8000 particles per unit of rapidi
ty. The silicon drift detectors are a very good candidate for this app
lication, but up to now no large system using this technology has been
industrially produced and operated in experiments. One of the first s
teps towards large scale production is the study of the doping uniform
ity in commercially available Si wafers. The understanding of doping f
luctuations is of fundamental importance since they introduce deviatio
ns of the electron trajectories from the expected ones. In addition, i
t is also necessary to know the changes possibly introduced by differe
nt processing steps in the resistivity profiles. We report here the re
sults of measurements of resistivity profiles for NTD silicon wafers b
oth before and after processing.