UNIFORM ARRAYS OF RESONANT-CAVITY ENHANCED INGAAS-ALGAAS HETEROJUNCTION PHOTOTRANSISTORS

We present uniformity data on arrays of resonant cavity enhanced InGaA s-AlGaAs phototransistors responding to wavelengths for which the GaAs substrate is transparent The arrays consist of 7x7 transistors. The u niformity in resonant wavelength and maximum responsivity was found to be good within individual arrays, The standard deviation of the reson ant wavelength was significantly smaller than the resonance full width at half maximum of 8 nm, However, large variations were observed betw een arrays. This shows the need for a resonant transistor design that can be post-growth tuned to the desired resonance wavelength without a ffecting the maximum responsivity.