RANGE DISTRIBUTION PARAMETERS OF IMPLANTED F-19 IONS IN NI0.8FE0.2 ALLOY

Depth profiles of fluorine in F-19+ implanted Ni0.8Fe0.2 alloy have be en accurately measured by using F-19(p, alphagamma) O-16 resonance nuc lear reaction at E(R) = 872.1 keV. A proper convolution calculation me thod was used to extract the true distribution of fluorine from the ex perimental excitation yield curves. The range parameters, R(p) and DEL TAR(p), were thereby obtained and compared with those simulated wit TR IM' 90 code. It shows that the experimental R(p) values agree with the Monte Carlo simulation values very well, while the experimental DELTA R(p) values are systematically larger than the calculation values.