DEPOSITION OF CUBIC SIC FILMS ON SILICON USING DIMETHYLISOPROPYLSILANE

Authors
BOO JH YU KS LEE M KIM Y
Citation
Jh. Boo et al., DEPOSITION OF CUBIC SIC FILMS ON SILICON USING DIMETHYLISOPROPYLSILANE, Applied physics letters, 66(25), 1995, pp. 3486-3488
Citations number
19
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
25
Year of publication
1995
Pages
3486 - 3488
Database
ISI
SICI code
0003-6951(1995)66:25<3486:DOCSFO>2.0.ZU;2-E