Cs. Jou et al., SWELLING STRESSES AND STRAINS ASSOCIATED WITH MASS-TRANSPORT IN POLYMERIC FILMS, JCT, Journal of coatings technology, 67(845), 1995, pp. 71-77
Citations number
12
Categorie Soggetti
Chemistry Applied","Materials Science, Coatings & Films
An experimental technique using a force-strain setup has been develope
d to measure the swelling stresses and strains of polymeric films. The
idea of the force-strain setup is similar in concept to the thermomec
hanical analyzer (TMA) except that the driving force is the moisture d
istribution, not the temperature distribution. This technique has been
used to characterize the swelling behavior of polyimide film that has
been used as passivation coatings in integrated circuit fabrication.
Coatings are often used to protect moisture attack; an understanding o
f the swelling stress and strain will allow better choice of the mater
ial and processed condition. One objective of this investigation is to
use the swelling information to determine diffusion coefficients. Gra
vimetric measurements are also performed to verify the results calcula
ted from the swelling experiment. With the information of mass uptake
and swelling strain, the swelling coefficient can also be determined.