EMPIRICAL DEPTH PROFILE SIMULATOR FOR ION-IMPLANTATION IN 6H-ALPHA-SIC

Authors
AHMED S BARBERO CJ SIGMON TW ERICKSON JW
Citation
S. Ahmed et al., EMPIRICAL DEPTH PROFILE SIMULATOR FOR ION-IMPLANTATION IN 6H-ALPHA-SIC, Journal of applied physics, 77(12), 1995, pp. 6194-6200
Citations number
38
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
12
Year of publication
1995
Pages
6194 - 6200
Database
ISI
SICI code
0021-8979(1995)77:12<6194:EDPSFI>2.0.ZU;2-Y