SPUTTERED SINX FILM FOR SELF-ALIGNED SI-ZN DIFFUSION INTO GAAS AND ALGAAS

Authors
ZOU WX BOUDREAU R HAN HT BOWEN T SHI SS MUI DSL MERZ JL
Citation
Wx. Zou et al., SPUTTERED SINX FILM FOR SELF-ALIGNED SI-ZN DIFFUSION INTO GAAS AND ALGAAS, Journal of applied physics, 77(12), 1995, pp. 6244-6246
Citations number
7
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
12
Year of publication
1995
Pages
6244 - 6246
Database
ISI
SICI code
0021-8979(1995)77:12<6244:SSFFSS>2.0.ZU;2-W