HYDROGEN-SURFACE REACTIONS DURING THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON BY REACTIVE MAGNETRON SPUTTERING - A REAL-TIME KINETIC-STUDYBY IN-SITU INFRARED-ABSORPTION

Authors
KATIYAR M YANG YH ABELSON JR
Citation
M. Katiyar et al., HYDROGEN-SURFACE REACTIONS DURING THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON BY REACTIVE MAGNETRON SPUTTERING - A REAL-TIME KINETIC-STUDYBY IN-SITU INFRARED-ABSORPTION, Journal of applied physics, 77(12), 1995, pp. 6247-6256
Citations number
40
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
12
Year of publication
1995
Pages
6247 - 6256
Database
ISI
SICI code
0021-8979(1995)77:12<6247:HRDTGO>2.0.ZU;2-R