REDUCTION OF SURFACE PARTICLES ON YBA2CU3O7-DELTA THIN-FILMS THROUGH THE USE OF NONSTOICHIOMETRIC SPUTTERING TARGETS AND N2O IN THE SPUTTERING GAS

Authors
JOHNSON CNL HELMERSSON U MADSEN LD RUDNER S WERNLUND LD
Citation
Cnl. Johnson et al., REDUCTION OF SURFACE PARTICLES ON YBA2CU3O7-DELTA THIN-FILMS THROUGH THE USE OF NONSTOICHIOMETRIC SPUTTERING TARGETS AND N2O IN THE SPUTTERING GAS, Journal of applied physics, 77(12), 1995, pp. 6388-6393
Citations number
22
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
12
Year of publication
1995
Pages
6388 - 6393
Database
ISI
SICI code
0021-8979(1995)77:12<6388:ROSPOY>2.0.ZU;2-8