A method that combines thin film deposition and physical masking techn
iques has been used for the parallel synthesis of spatially addressabl
e libraries of solid-state materials. Arrays containing different comb
inations, stoichiometries, and deposition sequences of BaCO3, Bi2O3, C
aO, CuO, PbO, SrCO3, and Y2O3 were generated with a series of binary m
asks. The arrays were sintered and BiSrCaCuO and YBaCuO superconductin
g films were identified. Samples as small as 200 micrometers by 200 mi
crometers in size were generated, corresponding to library densities o
f 10,000 sites per square inch. The ability to generate and screen com
binatorial libraries of solid-state compounds, when coupled with theor
y and empirical observations, may significantly increase the rate at w
hich novel electronic, magnetic, and optical materials are discovered
and theoretical predictions tested.