ADVANCED PROCESS SIMULATION OF METAL-FILM DEPOSITION

Authors
SORLIE C BRETT MJ DEW SK SMY T
Citation
C. Sorlie et al., ADVANCED PROCESS SIMULATION OF METAL-FILM DEPOSITION, Solid state technology, 38(6), 1995, pp. 101
Citations number
8
Categorie Soggetti
Engineering, Eletrical & Electronic","Physics, Applied","Physics, Condensed Matter
Journal title
Solid state technology → ACNP
ISSN journal
0038111X
Volume
38
Issue
6
Year of publication
1995
Database
ISI
SICI code
0038-111X(1995)38:6<101:APSOMD>2.0.ZU;2-8