FACTORS INFLUENCING THERMAL-CONDUCTIVITY IN DIAMOND FILM

Diamond films were synthesized on Si substrate by electron-assisted ch emical vapor deposition method using gas mixtures of methane (or aceto ne) and hydrogen. Various crystal structures of diamond films were obt ained by synthesis with various deposition conditions. The influences of various deposition conditions on thermal conductivity of diamond fi lm were studied. The results show that large-grain (100)-oriented diam ond films synthesised at lower concentration of methane end acetone ha ve higher thermal conductivity and thermal conductivity increases with the increasing in film thickness and the removal of the SiC layer on the back of the film, at last, annealing in ambience of hydrogen is ad vantageous to acquiring diamond him with high thermal conductivity.