Bg. Atabaev et al., THE EMISSION OF ATOMIC AND MOLECULAR-IONS UNDER SINGLE AND MULTIPLE-CHARGED RARE-GAS ION-BOMBARDMENT OF LIF, KCI, SIC, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 98(1-4), 1995, pp. 462-464
In this paper the sputtering of ionic crystals in the form of positive
ions under bombardment by multiple-charged ions of Ar and Kr with cha
rge q = 1-6 is studied. It is shown that the number of sputtered atoms
increases with increase of the charge q and the energy of bombarding
particles E(0), and the number of sputtered molecules is slightly chan
ged. It has been found that the potential energy of an ion stimulates
the sputtering of 1-2 layers beneath the surface. The results obtained
are discussed in the frame of the ideas about the dependence of bindi
ng energy of a surface atom on the charge of a bombarding ion.