SLOW, HIGHLY-CHARGED IONS FROM A 7.25 GHZ ECR ION-SOURCE

Authors
HENKE D TYRROFF H GROTZSCHEL R WIRTH H
Citation
D. Henke et al., SLOW, HIGHLY-CHARGED IONS FROM A 7.25 GHZ ECR ION-SOURCE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 98(1-4), 1995, pp. 528-531
Citations number
6
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
98
Issue
1-4
Year of publication
1995
Pages
528 - 531
Database
ISI
SICI code
0168-583X(1995)98:1-4<528:SHIFA7>2.0.ZU;2-J
Abstract
The layout of a surface treating facility using a beam of slow, highly charged ions is presented. Optimization results for the ion output of different charge states for argon and xenon are given. The maximum ou tputs of Ar12+ and Xe22+ amount to 350 and 120 el. nA. The properties of an ion deceleration system are described which can reduce the kinet ic energy of the ions by a factor of 200.