X-RAY SPECTROSCOPY ON ECR PLASMAS

Authors
FRIEDLEIN R HERPICH S LEHNERT U TYRROFF H WIRTH H ZIPPE C ZSCHORNACK G
Citation
R. Friedlein et al., X-RAY SPECTROSCOPY ON ECR PLASMAS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 98(1-4), 1995, pp. 585-588
Citations number
25
Categorie Soggetti
Physics, Nuclear","Nuclear Sciences & Tecnology","Instument & Instrumentation
Journal title
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms → ACNP
ISSN journal
0168583X
Volume
98
Issue
1-4
Year of publication
1995
Pages
585 - 588
Database
ISI
SICI code
0168-583X(1995)98:1-4<585:XSOEP>2.0.ZU;2-4
Abstract
Measurements of X-ray spectra from ECR plasmas of the 7.25 GHz ECR ion source of the FZ Rossendorf and the very first measurements of the 14 .5 GHz ECR ion source of the TU Dresden are presented. The measurement s have been accomplished using energy dispersive and wavelength disper sive X-ray spectrometers. It is shown that X ray spectroscopy is suita ble for providing source diagnostics to determine electron energy dist ribution functions, ion densities, ion charge state distributions and other source parameters.