Dk. Umemoto et al., 35-GHZ HEMT AMPLIFIERS FABRICATED USING INTEGRATED HEMT-HBT MATERIAL GROWN BY SELECTIVE MBE, IEEE microwave and guided wave letters, 4(11), 1994, pp. 361-363
We have fabricated 35-GHz balanced low-noise amplifiers using pseudomo
rphic InGaAs-GaAs HEMT material monolithically integrated with HBT mat
erial grown by selective MBE. The 0.2-mum T-gate HEMT amplifiers fabri
cated using a merged HEMT-HBT process have equivalent gain and noise f
igure compared to amplifiers fabricated using normal MBE and our basel
ine HEMT-only process. This demonstration of high performance HEMT amp
lifiers using integrated HEMT-HBT material and a merged HEMT-HBT proce
ss enables the fabrication of a new class of multifunction monolithic
microwave integrated circuits.