IDENTIFICATION OF PHOSPHORUS IN DIAMOND THIN-FILMS USING ELECTRON-PARAMAGNETIC-RESONANCE SPECTROSCOPY

Authors
ZVANUT ME CARLOS WE FREITAS JA JAMISON KD HELLMER RP
Citation
Me. Zvanut et al., IDENTIFICATION OF PHOSPHORUS IN DIAMOND THIN-FILMS USING ELECTRON-PARAMAGNETIC-RESONANCE SPECTROSCOPY, Applied physics letters, 65(18), 1994, pp. 2287-2289
Citations number
17
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
65
Issue
18
Year of publication
1994
Pages
2287 - 2289
Database
ISI
SICI code
0003-6951(1994)65:18<2287:IOPIDT>2.0.ZU;2-D
Abstract
An electron paramagnetic-resonance study of diamond films doped by imp lantation of phosphorus during film deposition is reported. Samples wi th nominal phosphorus concentration between 10(16) and 10(17) cm(-3) e xhibit two isotropic lines of equal intensity separated by 27 G. The d ouble-line spectrum is expected for a nuclear-spin 1/2 species such as phosphorus. The symmetry of the center and the temperature dependence of the spin concentration suggest that phosphorus forms a substitutio nal shallow donor in diamond. (c) 1994 American institute of Physics.