J. Jagielski et al., MIGRATION OF NITROGEN-IMPLANTED INTO IRON-INDUCED BY THE PRESENCE OF A BURIED CARBON-RICH LAYER, Journal of applied physics, 76(9), 1994, pp. 5132-5135
A redistribution of nitrogen atoms towards a buried carbon-rich layer
is observed for thin iron films implanted at 250 degrees C. The effect
is attributed to the formation of epsilon-Fe-3-x(C,N) iron carbonitri
de. Above 300 degrees C the epsilon-carbonitride phase becomes unstabl
e and consequently the redistribution effect vanishes leading to well-
separated profiles of nitrogen and carbon atoms.