MIGRATION OF NITROGEN-IMPLANTED INTO IRON-INDUCED BY THE PRESENCE OF A BURIED CARBON-RICH LAYER

Citation
J. Jagielski et al., MIGRATION OF NITROGEN-IMPLANTED INTO IRON-INDUCED BY THE PRESENCE OF A BURIED CARBON-RICH LAYER, Journal of applied physics, 76(9), 1994, pp. 5132-5135
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00218979
Volume
76
Issue
9
Year of publication
1994
Pages
5132 - 5135
Database
ISI
SICI code
0021-8979(1994)76:9<5132:MONIIB>2.0.ZU;2-D
Abstract
A redistribution of nitrogen atoms towards a buried carbon-rich layer is observed for thin iron films implanted at 250 degrees C. The effect is attributed to the formation of epsilon-Fe-3-x(C,N) iron carbonitri de. Above 300 degrees C the epsilon-carbonitride phase becomes unstabl e and consequently the redistribution effect vanishes leading to well- separated profiles of nitrogen and carbon atoms.