Oi. Lyamina et Ta. Kupriyanova, METHOD OF X-RAY-FLUORESCENCE ANALYSIS OF THE LASER HETEROSTRUCTURES GAAS-GA1-XALXAS, Industrial laboratory, 60(6), 1994, pp. 338-340
A method of x-ray fluorescence analysis of films on substrates with th
e use of single massive reference specimens is suggested. This method
is based on the difference in penetrating abilities of primary and sec
ondary x-rays of various series and elements and hence on the differen
ce in the size of the information zone specified for different analyti
cal x-ray lines and excitation conditions.