PHOTOLUMINESCENCE DETERMINATION OF THE NITROGEN DOPING CONCENTRATION IN 6H-SIC

Authors
HENRY A KORDINA O HALLIN C HEMMINGSSON C JANZEN E
Citation
A. Henry et al., PHOTOLUMINESCENCE DETERMINATION OF THE NITROGEN DOPING CONCENTRATION IN 6H-SIC, Applied physics letters, 65(19), 1994, pp. 2457-2459
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
65
Issue
19
Year of publication
1994
Pages
2457 - 2459
Database
ISI
SICI code
0003-6951(1994)65:19<2457:PDOTND>2.0.ZU;2-C
Abstract
The intensity of impurity and intrinsic luminescence lines reflects th e impurity doping concentration. A calibration procedure is presented for the nitrogen impurity in 6H-SiC. The calibration is valid for a la rge range of n-type doping from 10(14) to 10(16) cm(-3). Effects of ex citation density, temperature during the photoluminescence experiments as well as the observation of acceptor related lines are discussed. ( C) 1994 American Institute of Physics.