NEAR-FIELD OPTICAL MICROSCOPY IN THE INFRARED RANGE

A short review of sub-wavelength microscopy in the mid-infrared range is given. The home built near-held optical microscope is described, wh ich permits the aquisition of (i) an image with a sub-wavelength spati al resolution and (ii) an infrared spectrum of an area smaller than th e one investigated by conventional means. Also, we present new results which unambiguously support the specifications of the instrument. The spatial resolution is illustrated by the image of a small chessboard formed by silica patterns deposited on silicon. The locally resolved i nfrared spectroscopy is achieved on a 5 mu m(2) sol-gel area with a sp ectral resolution of the order of a few wavenumbers. Finally, we short ly discuss future prospects based on the present state of the art in t he visible range. Copyright (C) 1996 Elsevier Science Ltd