ELASTIC RECOIL DETECTION ANALYSIS FOR HYDROGEN NEAR-THE-SURFACE OF CHEMICAL-VAPOR-DEPOSITED DIAMOND

Elastic recoil detection analysis (ERDA) was performed to determine hy drogen concentration profiles near the (100) surfaces of epitaxially g rown diamond films. Microwave plasma chemical vapor deposition (CVD) w as used for the growth. At the end of the growth, the substrates were treated with and without exposure to H-2/O-2 plasma. The areal density of hydrogen determined by ERDA ranged from 5 to 7 x 10(15) atoms/cm(2 ) near the surface of the specimens. These areal densities were 3-4 ti mes larger than that of C atoms on ideal (100) surface of diamond (sim ilar to 1.6 x 10(15)).