H. Asano et al., PHOTOELECTRON-SPECTROSCOPY OF EUBA2CU3O7-Y THIN-FILM SURFACES TREATEDBY AN ELECTRON-CYCLOTRON-RESONANCE OXYGEN-ION BEAM, JPN J A P 2, 34(4A), 1995, pp. 433-436
Surface modification of EuBa2Cu3O7-y (EBCO) thin films induced by an e
lectron cyclotron resonance (ECR) oxygen ion beam treatment has been s
tudied using X-ray and synchrotron-radiation photoelectron spectroscop
y (XPS and SRPES). The in situ, characterization has been performed du
ring the course of 50 eV ECR oxygen treatment for 30 min. Time-depende
nt analysis shows that the contaminant carbon layer on the surface reg
ion can be removed at the initial stage of the treatment (<2 min), and
that the copper valence of the surfaces can be recovered to CU2+ afte
r 30 min treatment. It is found that room-temperature treatment using
ECR oxygen can alter the contaminated, oxygen-depleted surface to a cl
ean, well-oxygenated surface. The present results suggest that ECR tre
atment which can modify the surfaces in a well-defined manner would be
a feasible technique for surface cleaning of high-temperature superco
nductors.