H. Hasegawa et al., MORE THAN 10(3) TIMES PHOTOLUMINESCENCE INTENSITY RECOVERY BY SILICONINTERFACE-CONTROL-LAYER-BASED SURFACE PASSIVATION OF NEAR-SURFACE QUANTUM-WELLS, JPN J A P 2, 34(4B), 1995, pp. 495-498
The latest version of the silicon interface control layer (ICL)-based
passivation process utilizing a Si/Si3N4 double-layer ICL was applied
to passivation of Al0.3Ga0.7As/GaAs/Al0.3Ga0.7As near-surface quantum
wells (QWs). Its effectiveness was investigated using normalized PL in
tensities from passivated and unpassivated QWs. Complete recovery of P
L intensity was achieved by the novel passivation with an observed max
imum recovery factor of 1.4x10(3).