Ty. Yen et Cp. Chou, SYNTHESIS OF CARBON NITRIDE FILMS BY MAGNETICALLY ROTATED ARC-PLASMA JET CHEMICAL-VAPOR-DEPOSITION, Solid state communications, 95(5), 1995, pp. 281-286
Carbon Nitride films have been grown on nickel substrates by magnetica
lly rotated arc-plasma jet chemical vapor deposition (CVD). These film
s were characterized by scanning electron microscopy (SEM), wavelength
dispersive X-ray spectrometry (WDS) transmission electron microscopy
(TEM), and Raman spectroscopy. Small grains (similar to 0.1 mu m) as w
ell as nanocrystallites found in the films were identified to be beta-
C3N4. Raman spectrum also confirmed the existence of beta-C3N4 phase i
n the films through three pronounced Raman bands at low frequency as e
xpected from the Hooke's law approximation.