INVESTIGATION OF THE QUARTZ RESONATOR AS AN INDUSTRIAL CLEANING MONITOR

The evaluation of cleaning processes can be performed in real time usi ng the quartz resonator (QR) cleaning monitor as an in situ probe to m onitor surface contamination. Viscous properties of thin films are mod eled to determine the QR's limitation to film thickness in contact wit h liquids of varying properties. The demonstrated ability to provide s ubmonolayer mass detection during a cleaning process allows this monit or to be used to probe the kinetics and effectiveness of a cleaning pr ocess. This capability can rapidly evaluate the total effectiveness of environmentally friendly alternative cleaning processes needed to rep lace cleaners such as chlorofluorocarbons (CFCs) and chlorinated hydro carbons. These monitors could also be used to verify cleaning bath int egrity so that bath cleaning solution changes are optimized. This cond ition would maintain high product quality and yield while minimizing w aste from disposal.