CHARACTERIZATION OF THIN SOLID FILMS OF RARE-EARTH-OXIDES FORMED BY THE METALLOORGANIC CHEMICAL-VAPOR-DEPOSITION TECHNIQUE, FOR HIGH-TEMPERATURE CORROSION APPLICATIONS

Thin films of rare earth oxides (REOs) have been deposited on stainles s steel and quartz substrates by the metallo-organic chemical vapour d eposition technique, using beta-diketonate precursors. The structure a nd characteristics of the REO films were determined by scanning electr on microscopy, X-ray diffraction, Auger electron spectroscopy, Seconda ry ion mass spectroscopy and X-ray photoelectron spectroscopy. The thi cknesses of the coatings were determined by highly accurate weighing a nd by profilometry after a laser impact. Coated steel samples were oxi dized at high temperature in isothermal and cyclic conditions to study the deposited rare earth element effect.