CHARACTERIZATION OF THIN SOLID FILMS OF RARE-EARTH-OXIDES FORMED BY THE METALLOORGANIC CHEMICAL-VAPOR-DEPOSITION TECHNIQUE, FOR HIGH-TEMPERATURE CORROSION APPLICATIONS
G. Bonnet et al., CHARACTERIZATION OF THIN SOLID FILMS OF RARE-EARTH-OXIDES FORMED BY THE METALLOORGANIC CHEMICAL-VAPOR-DEPOSITION TECHNIQUE, FOR HIGH-TEMPERATURE CORROSION APPLICATIONS, Thin solid films, 261(1-2), 1995, pp. 31-36
Thin films of rare earth oxides (REOs) have been deposited on stainles
s steel and quartz substrates by the metallo-organic chemical vapour d
eposition technique, using beta-diketonate precursors. The structure a
nd characteristics of the REO films were determined by scanning electr
on microscopy, X-ray diffraction, Auger electron spectroscopy, Seconda
ry ion mass spectroscopy and X-ray photoelectron spectroscopy. The thi
cknesses of the coatings were determined by highly accurate weighing a
nd by profilometry after a laser impact. Coated steel samples were oxi
dized at high temperature in isothermal and cyclic conditions to study
the deposited rare earth element effect.