ATOMIC-FORCE MICROSCOPY ON CROSS-SECTIONS OF OPTICAL COATINGS - A NEWMETHOD

Authors
DUPARRE A RUPPE C PISCHOW KA ADAMIK M BARNA PB
Citation
A. Duparre et al., ATOMIC-FORCE MICROSCOPY ON CROSS-SECTIONS OF OPTICAL COATINGS - A NEWMETHOD, Thin solid films, 261(1-2), 1995, pp. 70-75
Citations number
16
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
261
Issue
1-2
Year of publication
1995
Pages
70 - 75
Database
ISI
SICI code
0040-6090(1995)261:1-2<70:AMOCOO>2.0.ZU;2-H
Abstract
Two methods are described of preparing and investigating cross-section s of single layer and multilayer optical coatings by atomic force micr oscopy (AFM). The first consists of mechanical grinding and polishing followed by a final ion-polishing and etching procedure. The second is simply mechanically fracturing. The results obtained from both prepar ation methods are compared. In addition, cross-sectional transmission electron microscopy has been used to verify the AFM results.