GRAIN-SIZE AND RECRYSTALLIZATION OF TIN, ZRN, NBN, AND CRN ALLOYED AND MULTILAYER FILMS

Authors
ANDRIEVSKI RA ANISIMOVA IA ANISIMOV VP MAKAROV VP POPOVA VP
Citation
Ra. Andrievski et al., GRAIN-SIZE AND RECRYSTALLIZATION OF TIN, ZRN, NBN, AND CRN ALLOYED AND MULTILAYER FILMS, Thin solid films, 261(1-2), 1995, pp. 83-86
Citations number
15
Categorie Soggetti
Physics, Applied","Material Science","Physics, Condensed Matter
Journal title
Thin solid films → ACNP
ISSN journal
00406090
Volume
261
Issue
1-2
Year of publication
1995
Pages
83 - 86
Database
ISI
SICI code
0040-6090(1995)261:1-2<83:GAROTZ>2.0.ZU;2-1
Abstract
The grain size and the recrystallization of some transition metal nitr ide films as well as of multilayer and alloyed films were investigated by electron microscopy. These films were obtained by are evaporation in an atmosphere of nitrogen. The influence of film thickness in the r ange of 0.1-2 mu m, alloying and layer number on grain size is describ ed. The change of grain size at annealing (T=673-1273 K) is also analy sed. The recrystallization temperature decreased with decreasing film thickness. The recrystallization rate is lowered in the multilayer fil ms.