MOLYBDENUM BERYLLIUM MULTILAYER MIRRORS FOR NORMAL INCIDENCE IN THE EXTREME-ULTRAVIOLET

Authors
SKULINA KM ALFORD CS BIONTA RM MAKOWIECKI DM GULLIKSON EM SOUFLI R KORTRIGHT JB UNDERWOOD JH
Citation
Km. Skulina et al., MOLYBDENUM BERYLLIUM MULTILAYER MIRRORS FOR NORMAL INCIDENCE IN THE EXTREME-ULTRAVIOLET, Applied optics, 34(19), 1995, pp. 3727-3730
Citations number
14
Categorie Soggetti
Optics
Journal title
Applied optics → ACNP
ISSN journal
00036935
Volume
34
Issue
19
Year of publication
1995
Pages
3727 - 3730
Database
ISI
SICI code
0003-6935(1995)34:19<3727:MBMMFN>2.0.ZU;2-Y
Abstract
We report on a series of normal-incidence reflectance measurements at wavelengths just longer than the beryllium K-edge (11.1 nm) from molyb denum/beryllium multilayer mirrors. The highest peak reflectance was 6 8.7 +/- 0.2% at lambda = 11.3 nm obtained from a mirror with 70 bilaye rs ending in beryllium. To our knowledge, this is the highest normal-i ncidence reflectance that has been demonstrated in the 1-80-nm spectra l range.