Zj. Ding et R. Shimizu, EFFECT OF ELASTIC-SCATTERING AND CYLINDRICAL MIRROR ANALYZER GEOMETRYON THE EVALUATION OF ESCAPE DEPTHS OF AUGER ELECTRONS, Surface and interface analysis, 23(6), 1995, pp. 351-362
We have studied the effect of elastic scattering and analyser geometry
on calculations of electron escape depths. A theoretical analysis of
the electron escape depth has been presented that shows how it is rela
ted to the solid angle for detection and the geometrical configuration
of a cylindrical mirror analyser. To estimate the extent to which ela
stic scattering can modify the values of the escape depth, Monte Carlo
simulations of the emission of Auger electrons were carried out for C
u MVV (59 eV), Cu LMM (916 eV), Au NW (238 eV) and Au MNN (2025 eV) si
gnals. From the calculated depth distributions of signal electrons, we
have derived a correction factor for the electron escape depth in ter
ms of the corresponding inelastic mean free path which includes both t
he effects of elastic scattering and analyser geometry. We have found
that elastic scattering reduces the value of the escape depth by sever
al tens of per cent and, depending on the target, signal electron ener
gy and analyser geometry, the ratio between the escape depth and the i
nelastic mean free path varies from 0.4 to 0.6.