DIAMOND DEPOSITION USING A PLANAR RADIO-FREQUENCY INDUCTIVELY-COUPLEDPLASMA

Authors
BOZEMAN SP TUCKER DA STONER BR GLASS JT HOOKE WM
Citation
Sp. Bozeman et al., DIAMOND DEPOSITION USING A PLANAR RADIO-FREQUENCY INDUCTIVELY-COUPLEDPLASMA, Applied physics letters, 66(26), 1995, pp. 3579-3581
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
26
Year of publication
1995
Pages
3579 - 3581
Database
ISI
SICI code
0003-6951(1995)66:26<3579:DDUAPR>2.0.ZU;2-N