ON THE ROLE OF ATOMIC OXYGEN IN THE ETCHING OF ORGANIC POLYMERS IN A RADIOFREQUENCY OXYGEN DISCHARGE

Authors
COLLART EJH BAGGERMAN JAG VISSER RJ
Citation
Ejh. Collart et al., ON THE ROLE OF ATOMIC OXYGEN IN THE ETCHING OF ORGANIC POLYMERS IN A RADIOFREQUENCY OXYGEN DISCHARGE, Journal of applied physics, 78(1), 1995, pp. 47-54
Citations number
37
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
78
Issue
1
Year of publication
1995
Pages
47 - 54
Database
ISI
SICI code
0021-8979(1995)78:1<47:OTROAO>2.0.ZU;2-5