MEASUREMENTS OF ELECTROMAGNETIC-FIELDS IN A PLANAR RADIOFREQUENCY INDUCTIVELY-COUPLED PLASMA SOURCE

Authors
MEYER JA WENDT AE
Citation
Ja. Meyer et Ae. Wendt, MEASUREMENTS OF ELECTROMAGNETIC-FIELDS IN A PLANAR RADIOFREQUENCY INDUCTIVELY-COUPLED PLASMA SOURCE, Journal of applied physics, 78(1), 1995, pp. 90-96
Citations number
13
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
78
Issue
1
Year of publication
1995
Pages
90 - 96
Database
ISI
SICI code
0021-8979(1995)78:1<90:MOEIAP>2.0.ZU;2-5