A VDF TRFE COPOLYMER ON SILICON PYROELECTRIC SENSOR - DESIGN CONSIDERATIONS AND EXPERIMENTS/

Citation
D. Setiadi et Ppl. Regtien, A VDF TRFE COPOLYMER ON SILICON PYROELECTRIC SENSOR - DESIGN CONSIDERATIONS AND EXPERIMENTS/, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 408-412
Citations number
3
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
ISSN journal
09244247
Volume
47
Issue
1-3
Year of publication
1995
Pages
408 - 412
Database
ISI
SICI code
0924-4247(1995)47:1-3<408:AVTCOS>2.0.ZU;2-1
Abstract
For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethy lene) copolymer-on-silicon pyroelectric sensor, the one-dimensional di ffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement o f the sensor can be obtained by: (a) etching the silicon substrate und er the sensor element and (b) an additional VDF/TrFE copolymer layer a s thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise source s. This conclusion has been verified by measured values.