R. Zengerle et al., TRANSIENT MEASUREMENTS ON MINIATURIZED DIAPHRAGM PUMPS IN MICROFLUID SYSTEMS, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 557-561
In this paper the dynamics of miniaturized diaphragm pumps will be inv
estigated by transient pressure measurements on the millisecond time s
cale. The results will be compared with simulations. It will be shown
that there is a strong interaction between the dynamics of miniaturize
d diaphragm pumps and the geometry of the connected fluid channels, ca
used by the inertia of the fluid.