AFM IMAGING WITH AN XY-MICROPOSITIONER WITH INTEGRATED TIP

Authors
INDERMUHLE PF JAECKLIN VP BRUGGER J LINDER C DEROOIJ NF BINGGELI M
Citation
Pf. Indermuhle et al., AFM IMAGING WITH AN XY-MICROPOSITIONER WITH INTEGRATED TIP, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 562-565
Citations number
6
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
47
Issue
1-3
Year of publication
1995
Pages
562 - 565
Database
ISI
SICI code
0924-4247(1995)47:1-3<562:AIWAXW>2.0.ZU;2-9
Abstract
We have fabricated an xy-microstage with integrated protruding tip and electrostatic comb actuators for scanning probe surface imaging. This device, which is micromachined in monocrystalline silicon, has been a ctuated and characterized and, for the first time with such a microtoo l, an atomic force microscope (AFM) profile has been achieved.