THERMALLY ACTUATED CMOS MICROMIRRORS

Authors
BUHLER J FUNK J PAUL O STEINER FP BALTES H
Citation
J. Buhler et al., THERMALLY ACTUATED CMOS MICROMIRRORS, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 572-575
Citations number
7
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
Journal title
Sensors and actuators. A, Physical → ACNP
ISSN journal
09244247
Volume
47
Issue
1-3
Year of publication
1995
Pages
572 - 575
Database
ISI
SICI code
0924-4247(1995)47:1-3<572:TACM>2.0.ZU;2-D
Abstract
Thermally actuated micromirrors fabricated using a standard CMOS proce ss and one subsequent anisotropic silicon etch step are presented. The device consists of a mirror plate supported by bimorph cantilever bea ms. Even short beams show a large deflection effect. A theoretical ana lysis valid for n-morph bending beams has been derived and found to be consistent with experimental and computer-simulation results.