MICRO-WINDMILL FOR OPTICAL-SCANNING AND FLOW MEASUREMENT

This paper reports on the development of a micro-windmill. The device consists of a 0.6 mm diameter rotor with four spokes connecting a 10 m u m wide outer ring with a 10 mu m wide inner ring. A hinged polysilic on plate along each spoke is water-assembled or manually assembled to stand 100 mu m high. Rotation of the windmill has been obser ed in an air stream with pressure of less then 40 N/m(2). However, the windmill would not spin under the same conditions when the air stream pressure was 26 N/m(2). The micro-windmill has been successfully used as an op tical scanner, with angular repeatability of 5 degrees and angular var iation of 2 degrees perpendicular to the scan direction.