MICRO-WINDMILL FOR OPTICAL-SCANNING AND FLOW MEASUREMENT

Authors
Citation
M. Ross et Ksj. Pister, MICRO-WINDMILL FOR OPTICAL-SCANNING AND FLOW MEASUREMENT, Sensors and actuators. A, Physical, 47(1-3), 1995, pp. 576-579
Citations number
9
Categorie Soggetti
Engineering, Eletrical & Electronic","Instument & Instrumentation
ISSN journal
09244247
Volume
47
Issue
1-3
Year of publication
1995
Pages
576 - 579
Database
ISI
SICI code
0924-4247(1995)47:1-3<576:MFOAFM>2.0.ZU;2-I
Abstract
This paper reports on the development of a micro-windmill. The device consists of a 0.6 mm diameter rotor with four spokes connecting a 10 m u m wide outer ring with a 10 mu m wide inner ring. A hinged polysilic on plate along each spoke is water-assembled or manually assembled to stand 100 mu m high. Rotation of the windmill has been obser ed in an air stream with pressure of less then 40 N/m(2). However, the windmill would not spin under the same conditions when the air stream pressure was 26 N/m(2). The micro-windmill has been successfully used as an op tical scanner, with angular repeatability of 5 degrees and angular var iation of 2 degrees perpendicular to the scan direction.